In order to well investigate the effect of different substrates on the friction and wear of diamond-like carbon (DLC) coating, the DLC coatings are deposited on substrates like the high-speed steel (HSS), SiC and 304 stainless steel by using plasma enhanced chemical vapor deposition method. The diamond-like carbon is prepared. The microstructure of the coatings is characterized using SEM, TEM and Raman. The SEM results exhibit that the total thickness of the coatings is about 6.5 μm, and there's apparent interfaces between layers. The TEM results imply that the coatings have an amorphous structure. Raman spectrum exhibits that G and D peaks are observed, which implies that the deposition coatings are diamond-like carbon coating. The results of tribological tests show that the substrates have a significant effect on the friction and wear of the coating. For different substrates, the transfer film is found on the steel counterpart surface, the wear track of the HSS has a lowest width, and the DLC coating that deposited on HSS exhibits the lowest wear and low friction coefficient (about 0.1).The microstructure of different substrates wear track surfaces is analyzed by using Raman spectrum, and the lowest wear of the HSS is attributed to the lower degree of the graphitization. The research provides reference for preparing the DLC coating with excellent tribological properties.